The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 1992
Filed:
Dec. 12, 1988
Applicant:
Inventors:
Tadayuki Imanaka, Suita, JP;
Shoji Sakurai, Shizuoka, JP;
Assignee:
Nikko Bio Technica Co., Ltd., Shizuoka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 42 ; 252D / ; 25217412 ; 134 251 ;
Abstract
Disclosed is a method of super precision devices such as semiconductor devices. In the method of the present invention, the devices are washed with an aqueous solution containing a purified proteolytic enzyme, poly(oligo)saccharide-decomposing enzyme, or a lipid or oil-decomposing enzyme.