The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1991
Filed:
Mar. 16, 1989
Applicant:
Inventors:
Ralph F Cohn, Worcester, MA (US);
James W Wagner, Annapolis, MD (US);
Assignee:
The Johns Hopkins University, Baltimore, MD (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01J / ;
U.S. Cl.
CPC ...
356369 ; 250225 ;
Abstract
Dynamic imaging microellipsometry (DIM) is a rapid full-field imaging technique for high resolution studies of thin-films. The DIM concept is based on radiometric polarizer, compensator, specimen, analyzer (PCSA) ellipsometry combined with video and image processing techniques. The theoretical basis for this approach is developed using the Jones vector and matrix formalism. Basic systems design is presented with error model predictions of ellipsometric accuracies better than 0.1.degree. for full-field .psi. and .DELTA. images captured in a few seconds with spatial resolution under 10 microns.