The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1991
Filed:
Mar. 26, 1990
Applicant:
Inventors:
Frank Hegner, Maulburg, DE;
Manfred Frank, Maulburg, DE;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01B / ;
U.S. Cl.
CPC ...
9210 / ; 9210 / ; 73715 ; 73717 ; 73723 ; 73721 ;
Abstract
The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.
Quick Actions:
Hegner, Frank. (1991). Pressure sensor including a diaphragm having a protective layer thereon (U.S. Patent No. 5076147). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5076147
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile