The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1991
Filed:
Apr. 28, 1989
Applicant:
Inventor:
Robert E Steere, Jr, Boonton, NJ (US);
Assignee:
Silicon Technology Corporation, Oakland, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ; B24B / ; B24B / ; B24B / ;
U.S. Cl.
CPC ...
5110 / ; 5128 / ; 5116571 ; 51 35 ;
Abstract
The flat grind stage assembly is programmed so that the grinding wheel is first caused to move along a straight path to form a flat on a wafer while the wafer is held in a stationary position. Thereafter, the grinding wheel is returned to the mid-point of the flat and then moved away from the flat. The wafer is then rotated and grinding commences when the end of the flat is reached so that a circular periphery is ground on the remainder of the wafer while the axis of the grinding wheel remains stationary.