The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 1991
Filed:
Nov. 30, 1989
Satoru Nishiwaki, Tokyo, JP;
Hiroshi Miyazaki, Yokohama, JP;
Koji Murakami, Yokohama, JP;
Yukinobu Takahashi, Yokohama, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A humidity sensor and a method for producing the same, in which an insulating film is first formed on a substrate. A first sensing film is formed on a first electrode to be separated by a space from the insulating film. A second sensing film of the same material as the first sensing film is again formed on the first sensing film and the insulating film, the space therebetween being filled with the second sensing film. Thus a uniform surface etching of the second sensing film is effected, to obtain a continuous flat film layer composed of the sensing film and the insulating film with a continuous flat surface, and in which a second electrode is formed on at least the sensing film.