The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 1991

Filed:

Jun. 27, 1990
Applicant:
Inventor:

Mark Zdeblick, Mountain View, CA (US);

Assignee:

Stanford University, Stanford, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; H01L / ; H01J / ; F16K / ;
U.S. Cl.
CPC ...
385 14 ; 359291 ; 359297 ; 359665 ; 359667 ; 357 26 ; 357 28 ; 25022725 ; 250573 ; 25023119 ; 250238 ; 251 11 ; 137829 ; 385 33 ; 385147 ;
Abstract

A variable focal length lens integrated onto a silicon wafer. A light transmitting material such as gas or liquid is entrapped in a cavity in the wafer. The cavity has a flexible, light transmitting wall. The wall provides one surface of the lens. When the material inside the cavity is heated or cooled, the wall flexes and the focal length of the lens changes. The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications.


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