The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 1991
Filed:
Jul. 10, 1990
Applicant:
Inventor:
Virgle L Hedgcoth, Pomona, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429821 ; 20429812 ; 20429823 ; 20419212 ;
Abstract
A magnetron sputtering device for coating planar substrates with sputtered ions. The sputtering occurs from the internal wall of a cylindrical hollow flanged cathode target that includes a slot longitudinally disposed in a sidewall of the cathode. A first portion of sputtered atoms travel through the slot and onto a planar substrate moving relative to the sputtering device and a second portion of sputtered atoms simply redeposit on the internal wall of the cathode target such that the target cathode evenly erodes.