The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 1991

Filed:

Nov. 06, 1990
Applicant:
Inventors:

Peter A Whiffin, Horsham, GB;

Christopher D Maxey, Crawley, GB;

Brian C Easton, Reigate, GB;

Assignee:

U.S. Philips Corporation, New York, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ; 118724 ;
Abstract

A CVD reactor vessel for forming a solid state electronic device comprising (a) a reaction zone laterally separated from a first zone, (b) support means for supporting a substrate in said reaction zone, (c) heating means for heating both said first zone and said reaction zone, (d) first supply means for supplying at least one first reactant into a gas stream flowing from said first zone to said reaction zone, and (e) second supplying means for supplying at least one second reactant into said gas stream between said first zone and said reaction zone, said second supply means including an injection tube extending through said first zone to a location between said first zone and said reaction zone, said injection tube having a widened outlet so that the flow velocity of said second reactant more closely matching the flow velocity of said gas stream, wherein said substrate receives a layer of material such as cadmium mercury telluride formed from said reactants.


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