The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1991
Filed:
Sep. 21, 1989
Abstract
A topography simulation method for simulating a surface topography of a material object material while a surface of material object is being processed, as by etching or a deposition, includes the steps of dividing a region to be analyzed, in a surface including the advancing direction of processing, into a plurality of regions in a grid in accordance with the surface topography of the material object by approximating the movement of the processed surface of the material object as the movement of an equi-concentration surface determined by the diffusion of particles, establishing diffusion coefficients for the respective regions on the basis of the surface processing velocity, calculating equi-concentration surfaces by the Diffusion equation, and assembling the obtained equi-concentration surfaces to produce a three-dimensional surface topography.