The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 1991
Filed:
Oct. 24, 1990
Applicant:
Inventors:
Kenji Ohta, Kitakatsuragi, JP;
Yoshiteru Murakami, Nishinomiya, JP;
Nobuyuki Takamori, Nara, JP;
Kenichi Hijikata, Urawa, JP;
Takyuki Shingyoji, Urawa, JP;
Kazushige Takaishi, Omiya, JP;
Assignees:
Sharp Kabushiki Kaisha, Osaka, JP;
Mitsubishi Metal Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429812 ; 20429813 ; 20429819 ;
Abstract
A target unit includes a backing plate and a target member disposed on the backing plate. The target member includes at least one erosion member of a sputtering material and at least one holding member for releasably holding the erosion member on the backing plate.