The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 1991
Filed:
Jun. 05, 1990
Hanns-Peter Berges, Cologne, DE;
Berthold Fischer, Erfstadt, DE;
Peter Mueller, Cologne, DE;
Dieter Vorberg, Erfstadt, DE;
Leybold Aktiengesellschaft, , DE;
Abstract
A method and apparatus for delivering oil into a pump chamber of a high-vacuum stage of a multi-stage pump. The method includes the steps of sensing a first pressure at an intake region of the high-vacuum stage of the pump, and sensing a second pressure at a discharge region of the high-vacuum stage of the pump. Oil is delivered to the high-vacuum stage of the pump in response to a pressure difference between the first and second pressures. Increased quantities of oil are delivered to the high-vacuum stage of the pump when the pressure difference exceeds a predetermined value. A gas ballast may also be delivered to the high-vacuum stage of the pump when the pressure difference exceeds this predetermined value. The apparatus may include a diaphragm valve including a diaphragm mounted between subchambers that are respectively in fluid communication with the intake and discharge regions of the high-vacuum stage of the pump. When the pressure differential between the intake and discharge regions, and thus the subchambers, reaches a predetermined level, the diaphragm is distended to a sufficient degree to unseat a valve element, which allows increased quantities of oil to be delivered to the high-vacuum stage of the pump.