The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 1991

Filed:

Aug. 03, 1990
Applicant:
Inventor:

Ondrej L Krivanek, Oakland, CA (US);

Assignee:

Gatan, Inc., Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ;
U.S. Cl.
CPC ...
2504411 ; 250310 ; 250311 ; 250397 ; 358 93 ; 358229 ; 35821316 ;
Abstract

An apparatus comprising a cooled slow-scan charge-coupled device camera mounted in a chamber attached to a projection or specimen chamber of an electron microscope, and a vacuum valve separating the camera chamber from the microscope chamber. The operation of the vacuum valve is linked to the microscope vacuum system such that the valve remains open while the microscope chamber is under vacuum, but closes if the microscope chamber is about to be let up to atmospheric pressure, and stays closed until the microscope chamber is evacuated again. In an alternate embodiment of the invention, the camera is inserted by a pneumatically operated piston to the microscope chamber, and is withdrawn and sealed off in a separate vacuum chamber in the microscope chamber is about to be let up to air.


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