The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 1991
Filed:
Nov. 06, 1989
Applicant:
Inventor:
Klaus Wellerdieck, Buchs, CH;
Assignee:
Balzers Aktiengesellschaft, Balzers, LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23F / ;
U.S. Cl.
CPC ...
20429828 ; 20429808 ; 20429815 ; 20429834 ; 118723 ; 118730 ; 156345 ;
Abstract
To supply high-frequency energy to a workpiece support (5) which rotates in a vacuum chamber (3), a cylindrical electrode (19) is coaxially provided on a bearing shaft (7) and the energy is coupled in capacitively, via the rotary capacitor formed by the electrode (19) and the shaft (7).
Wellerdieck, Klaus. (1991). Feed through for application of hf energy (U.S. Patent No. 5064522). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5064522
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile