The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1991
Filed:
May. 17, 1990
Yutaka Kawata, Kobe, JP;
Ken-ichi Inoue, Kobe, JP;
Kiyotaka Ishibashi, Kobe, JP;
Akira Kobayashi, Kobe, JP;
Koji Inoue, Tokyo, JP;
Norio Suzuki, Kobe, JP;
Akio Arai, Kobe, JP;
Kaneo Yamada, Akashi, JP;
Keizo Tokushige, Matsubara, JP;
Hirofumi Fukuyama, Kobe, JP;
Shigeto Adachi, Kobe, JP;
Yukito Furukawa, Kobe, JP;
Sunao Takahashi, Kobe, JP;
Makoto Kimura, Kobe, JP;
Kabushiki Kaisha Kobe Seiko Sho, Kobe, JP;
Abstract
A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.