The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1991
Filed:
Mar. 06, 1990
Shigeru Sakuta, Yokosuka, JP;
Katsunobu Ueda, Yokohama, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A coarse/fine movement aligning apparatus of this invention includes a coarse movmeent driver for coarsely moving an object to be aligned, a fine adjustment for finely adjusting the object to be aligned, a position detector for detecting the position of the object to be aligned, a coarse/fine movement controller for selectively and simultaneously operating the coarse movment driver and the fine adjustment on the basis of a difference between the detection position obtained by the position detector and the target position of the object to be aligned, and an ultrafine movement controller for ultrafinely operating the fine adjustment to cause the object to be aligned to coincide with the target position.