The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1991
Filed:
Feb. 25, 1991
Kazumi Kuriyama, Yamanashi, JP;
Pioneer Electronic Corporation, Tokyo, JP;
Pioneer Video Corporation, Yamanashi, JP;
Abstract
A fluid supplying and processing device has a plurality of fluid guide pipes having distal ends opening above a workpiece such as a disc base. The open ends of the fluid guide pipes discharge respective different processing fluids supplied from respective fluid sources toward the workpiece for thereby processing the workpiece, such as to form a photoresist pattern on the surface of the disc base. At least one of the fluid guide pipes has at least a distal end portion inserted in another of the fluid guide pipes. The outer side surface of the distal end portion of said one fluid guide pipe is cleaned by a fluid flowing through the other surrounding fluid guide pipe.