The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1991
Filed:
Jan. 10, 1990
Applicant:
Inventors:
Robert E Steere, III, Boonton, NJ (US);
Thomas E Leonard, Vernon, CT (US);
Assignee:
Silicon Technology Corporation, Oakland, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
5121 / ; 5121 / ; 5123 / ;
Abstract
The wafer centering assembly includes a pair of pivot arms which can be pivoted simultaneously to adjust to the diameter of a conveyed wafer. Each pivot arm has a stop which arrest the motion of a wafer such that the axis of the wafer is approximately centered on the axis of a vacuum head.