The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 1991

Filed:

Sep. 17, 1990
Applicant:
Inventors:

Noboru Nomura, Kyoto, JP;

Hideo Nakagawa, Moriguchi, JP;

Taichi Koizumi, Osaka, JP;

Kenji Harafuji, Moriguchi, JP;

Mitsuhiro Okuni, Higashiosaka, JP;

Norimichi Anazawa, Higashiosaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 2503 / ; 2504421 ;
Abstract

A scanning electron microscope is disclosed in which an objective lens includes a first pole piece and a second pole piece. The first pole piece is provided with a hole through which an electron beam passes, and is disposed between an electron gun for emitting the electron beam and the second pole piece. The second pole piece has a planar portion on which a specimen is placed, and the second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.


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Nomura, Noboru. (1991). Scanning electron microscope and a method of displaying cross sectional (U.S. Patent No. 5057689). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5057689

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