The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 1991
Filed:
Feb. 04, 1991
Allan Berman, Sunnyvale, CA (US);
Imtec Products, Inc., Sunnyvale, CA (US);
Abstract
A chemical bath for immersing articles such as integrated circuit wafers in a hot flow of etchant or other liquid includes a liquid receptacle with a first compartment for receiving the articles and a second compartment which acts as sump and further includes a trough which channels overflow from the first compartment into the sump. A pump recirculates liquid from the sump back to the first compartment. The receptacle is supported by a casing in which the lower region of the receptacle is situated. The casing in which the lower region of the receptacle is situated. The casing is sealed by a flange on the receptacle which overlays a rim member on the casing and by sealing material situated between the rim member and the underside of the flange. The flange is located below the trough in vertically spaced apart relationship with the trough. This inhibits direct heat transfer from the trough to the seal and thereby enhances seal durability.