The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 1991

Filed:

Jul. 26, 1990
Applicant:
Inventors:

Hideki Nihei, Hitachi, JP;

Nobuyoshi Tsuboi, Tokai, JP;

Hiroyuki Minemura, Hitachi, JP;

Hiroshi Kimura, Hitachi, JP;

Shigeki Morinaga, Hitachi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N / ; H02K / ;
U.S. Cl.
CPC ...
310309 ; 310 12 ; 318135 ; 361233 ;
Abstract

An electrostatic actuator includes a stationary element and a movable element. The stationary element has a surface which faces a surface of the moving element. Both the surface of the stationary element and the surface of the moving element have electrode lines disposed thereon, including a first set of parallel electrode lines and a second set of parallel electrode lines which are perpendicular to the lines in the first set. By facing the stationary surface and the movable surface towards each other such that the electrode lines of such surfaces are aligned, the movable element can be moved along either of two perpendicular axes when a voltage is applied to the electrode lines.


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