The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 1991
Filed:
Jul. 11, 1989
Applicant:
Inventor:
Hirotsugu Shiraiwa, Hino, JP;
Assignee:
Tel Sagami Limited, Kanagawa, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G / ; H01L / ;
U.S. Cl.
CPC ...
414404 ; 981153 ; 414417 ; 4147448 ;
Abstract
The present invention relates to an apparatus for transferring a plurality of semiconductor wafers from their cassettes to a boat. This apparatus comprises a support body on which the cassettes and the boat are mounted, a lifter for lifting wafers from the cassettes, a handling device for carrying the wafers and transferring them to the boat, and a plurality fans for introducing dust created by the handling device into the support body and removing it outside the support body.