The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 1991
Filed:
Oct. 18, 1990
Applicant:
Inventor:
Gerhard Hild, Asslar, DE;
Assignee:
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH, Asslar, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C21C / ;
U.S. Cl.
CPC ...
266208 ; 75508 ;
Abstract
A multi-chamber vacuum installation includes a charge-changing chamber (5) and a plurality of processing chambers (1, 2, 3, 4) located within the charge-changing chamber. One of the processing chambers (4) also serves as an air lock chamber. The air lock chamber (4) is formed of two parts, and inner part (4a) and an outer part (4b). The inner part is secured to the inside and the outer part is secured to the outside of the charge-changing chamber.