The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 1991
Filed:
Jul. 19, 1989
Applicant:
Inventors:
Kenji Takahashi, Abiko, JP;
Takuji Torii, Ushiku, JP;
Takao Senshu, Shizuoka, JP;
Tetsuji Yamashita, Shizuoka, JP;
Shizuo Zushi, Hadano, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25B / ; F25B / ; H01L / ; F28D / ;
U.S. Cl.
CPC ...
165-1 ; 165 30 ; 165 39 ; 165 40 ; 165 804 ; 165101 ; 16510433 ; 62185 ; 62201 ; 622284 ; 361385 ;
Abstract
An LSI temperature controlling system has closed LSI cooling water circuit, and a refrigeration circuit including a motor-driven refrigerant compressor, a first heat exchanger for exchanging the heat of the LSI cooling water and the refrigerant and a second heat exchanger for exchanging the heats of the refrigerant and another fluid. The motor speed is controlled by an inverter the operation of which is controlled based on the temperature of the LSI cooling water measured by a temperature detector. A heater is used to suppress dew formation on LSI substrates.