The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 1991
Filed:
Jun. 21, 1990
Applicant:
Inventors:
Rolf Moe, Fremont, CA (US);
Nathaniel F Spieler, Fremont, CA (US);
David J Correia, Fremont, CA (US);
James J McMullen, Fremont, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F26B / ;
U.S. Cl.
CPC ...
34 78 ; 34 74 ; 34 73 ;
Abstract
A drier for wafers or the like has a drier chamber shaped to receive the wafer, which is lowered into the open top of the drier chamber and withdrawn therefrom by a lifter, which may be motor actuated. Below the drier chamber is a heater chamber to vaporize alcohol or other liquid, which rises and condenses on the relatively cool wafer. A water jacket around the top of the drier chamber condenses vapor and thus reduces escape of vapor.