The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 1991

Filed:

Jun. 25, 1990
Applicant:
Inventors:

Koichi Kitamura, Kawasaki, JP;

Hidenori Mimura, Kawasaki, JP;

Kazuo Yamamoto, Kawasaki, JP;

Yasumitsu Ohta, Kawasaki, JP;

Kazuyoshi Sai, Kawasaki, JP;

Kazuhiko Kawamura, Kawasaki, JP;

Noboru Otani, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 30 ; 357-2 ; 357 58 ;
Abstract

A pin diode having an incident layer which includes 1 to 10% of microcrystallized silicon is formed in a condition where a molar ratio of hydrogen to monosilane is 5:1 to 100:1 and applied power is 0.001 to 0.05 W/cm.sup.2. The pin diode as well as a contact image sensor comprising the same as excellent photoelectric transfer efficiency.


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