The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 1991
Filed:
Jun. 01, 1990
Applicant:
Inventors:
Tsuneaki Kadosawa, Ninomiyamachi, JP;
Nobushige Korenaga, Atsugi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05G / ;
U.S. Cl.
CPC ...
378 34 ; 378 97 ; 378108 ; 378207 ; 7502521 ;
Abstract
An X-ray aligner provided with a radiation gauge for detecting an intensity of the X-ray radiation. The sensitivity of the radiation gauge is influenced by the passed exposure, the passed non-exposure period and/or the time elapsed. The sensitivity change is compensated by the present invention. Thus, the correct exposure can be provided.