The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 1991
Filed:
Dec. 28, 1989
Applicant:
Inventors:
Roland Gesche, Seligenstadt, DE;
Stefan Locher, Alzenau, DE;
Assignee:
Leybold Aktiengesellschaft, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H / ; H03H / ;
U.S. Cl.
CPC ...
333 32 ; 333 / ; 336 62 ;
Abstract
The invention relates to a cooling device for circuit configurations in which high electrical energies are converted and specifically for electrical matching circuits with which the impedance of a plasma path is matched to a high frequency generator. Herein one or several coils are provided with a water cooling system in such a way that the cooling water is completely separated from the electromagnetic fields through metallic material. These coils consist of two tubes slid one into the other, wherein the cooling water is fed and drawn through the internal tube and between the two tubes so that it is completely within the field-free region.