The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 1991
Filed:
Oct. 14, 1987
Applicant:
Inventors:
Assignee:
Board of Regents, The University of Texas System, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F / ; C07F / ; C07F / ; C07F / ;
U.S. Cl.
CPC ...
556 19 ; 556 20 ; 556 30 ; 556174 ;
Abstract
The present invention involves chemical compounds particularly useful for the preparation of thin films or layers of group 3/group 5 materials by MOCVD and other techniques. Such compounds may be represented as having the formulas [M(ER'R').sub.3 ].sub.n or [RM(ER'R').sub.2 ].sub.n or [R.sub.2 M(ER'R')].sub.n wherein M is aluminum, gallium or indium; E is phosphorus, arsenic or antimony; R, R', and R' are one or more of hydrogen, alkyl, aryl, alkyl-substituted aryl, cyclic alkyl, halide or other anionic group; and n is between about 1 and about 6.