The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 1991
Filed:
Jun. 28, 1990
Applicant:
Inventors:
Petrus J Severin, Eindhoven, NL;
Gerrit Verspui, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356357 ; 356355 ;
Abstract
A device for the continuous measurement of the thickness of layers which are deposited on a substrate at low pressure, comprising a light source and two light conductors. Both light conductors are present in a pipe closed at one end by an optical window. Said end has an exchangeable sleeve which at one end comprises an optical window and which can be slid so as to fit the pipe in which the light conductors are present.