The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 1991
Filed:
Jun. 29, 1990
Applicant:
Inventor:
Edward N Sickafus, Grosse Ile, MI (US);
Assignee:
Ford Motor Company, Dearborn, MI (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156653 ; 156647 ; 156657 ; 156662 ;
Abstract
An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. A second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.