The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 1991
Filed:
Nov. 17, 1989
Applicant:
Inventors:
Assignee:
Nippon Zeon Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430191 ; 430165 ; 430192 ; 430193 ; 430326 ;
Abstract
A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the general formula (I) ##STR1## wherein R.sub.1 and R.sub.2 represents alkyl groups having 1 to 8 carbon atoms or a cycloalkyl group having 1 to 8 carbon atoms, R.sub.3 represents hydrogen, an alkyl group having 1 to 4 carbon atoms or halogen, R.sub.4 represents hydrogen or a cyano group and R.sub.5 represents a cyano group or a carboxyl group.