The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 1991
Filed:
Jun. 01, 1990
Karl A Harris, Liverpool, NY (US);
Thomas H Myers, II, Liverpool, NY (US);
General Electric Company, Syracuse, NY (US);
Abstract
The invention relates to molecular beam epitaxial (MBE) processing and more particularly to a two zone electrical furnace for use with high vapor pressure II-VI materials. The furnace is designed for use with effusion type crucibles requiring a lower temperature in the fill zone to control the flux and a higher temperature in the orifice zone to avoid clogging the customary collimating orifice. Each zone is heated by a distributively heated radiator, the fill zone radiator being of a tantalum foil construction of low thermal conductance, while the orifice zone radiator is a solid molybdenum cylinder of relatively high thermal conductance. The zones are joined by linking the two radiators by a thermally conductive path, while the shields and the distributed heaters of the respective zones are separated to reduce thermal coupling. The arrangement provides substantial independence between the temperature settings of the two zones and the molybdenum construction is free of erosion from tellurium based reagents.