The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1991
Filed:
Feb. 20, 1990
Donald O Smith, Lexington, MA (US);
Kenneth J Harte, Carlisle, MA (US);
Other;
Abstract
A light switched electron beam source employing a common photo-emitter cathode and at least two light emitting sources of monochromatic light, such as laser diodes, light emitting diodes and the like. A light optical collimating and aperture sub-system transmits the light images from the two or more light emitting sources onto a prism or other optical element for diverting the path of the light images onto a common path. The common photo-emitting cathode is positioned in the common path for selective excitation by the respective light emitting sources. An electron optical subsystem is coupled to the output from the common photo-emitter cathode for collimating and further sharpening the electron beam pattern and for projecting it upon a target plane which may comprise an integrated circuit structure upon which patterns are to be written.