The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1991
Filed:
Mar. 15, 1990
Applicant:
Inventors:
Peter Hammond, Rochester, NY (US);
Kevin S Schumacher, North Caldwell, NY (US);
Assignee:
S&K Products International, Inc., Chestnut Ridge, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134184 ; 134-1 ; 134902 ;
Abstract
A high frequency ultrasonic system for sonically removing particles from substrates or wafers held in a carrier or carriers in a tank of liquid, such as DI water. A frame encompasses the tank and supports the transducer housing at an angle with respect to the tank bottom and also provides for horizontal movement between the sides of the tank. A transducer housing supports at least one transducer within the transducer housing. The transducer housing can be supported and moved at an angle with respect to the tank bottom.