The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1991
Filed:
Dec. 27, 1989
Eugene A Swain, Webster, NY (US);
Thong Vo, Webster, NY (US);
Xerox Corporation, Stamford, CT (US);
Abstract
An apparatus for processing cylindrical and belt-like substrates includes: a support structure for supporting a planetary array of substrates about a central horizontal axis of the support structure, each substrate defining an offset horizontal axis radially spaced from and parallel to the central horizontal axis of the support structure; an array of processing modules each having a processing chamber for receiving the support structure therein for processing the substrates, each chamber defining a central horizontal axis parallel to the central horizontal axis of the support structure and parallel to the central horizontal axis of an adjacent processing chamber; and a transport vehicle for transporting the support structure in a first direction parallel to the central horizontal axis for insertion into and withdrawal from any one of the processing chambers, in a second direction perpendicular to the central horizontal axis for movement among adjacent processing chambers, and in a third direction perpendicular to the plane of the first and second directions. The array of modules is preferably a multi-level array.