The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 1991
Filed:
Apr. 25, 1989
Applicant:
Inventors:
Robert E Steere, III, Boonton, NJ (US);
Thomas E Leonard, Vernon, CT (US);
Assignee:
Silicon Technology Corporation, Oakland, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ; A46B / ;
U.S. Cl.
CPC ...
51268 ; 1525 / ;
Abstract
A seal assembly is mounted within a grinding machine to separate a grinding wheel from the main portions of a wafer being ground. The seal assembly has a pair of free edges which are disposed to define a V-shaped gap through which the peripheral edge of the wafer passes into grinding relation with the grinding wheel. A perforated hollow tube is also mounted behind the free edges of the strips to blow air onto and across the planar surface of the wafer being ground to prevent accumulation of debris thereon.