The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 1991
Filed:
Dec. 11, 1989
Applicant:
Inventors:
Klaus Herzog, Oberkochen, DE;
Karl Seitz, Oberkochen, DE;
Karl Schepperle, Oberkochen, DE;
Peter hnelt, Oberkochen, DE;
Assignee:
Carl-Zeiss-Stiftung, Heidenheim, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
33503 ; 33 / ; 33702 ;
Abstract
A coordinate measuring apparatus includes guides made of aluminum. Scales which are also made of aluminum are used to measure the position of the measuring slide movable on the guides. In a preferred embodiment, the scales are in the form of a reflection phase grating and are applied directly to the surface of the guide member. In addition, a temperature sensor is provided which measures the temperature of the guide member and of the scale divisions. A method of producing the scale divisions is also disclosed.