The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 1991

Filed:

Apr. 03, 1989
Applicant:
Inventor:

Takashi Hosaka, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 60 ; 437 41 ; 437 47 ; 437 51 ; 437 52 ; 437193 ; 437200 ; 437228 ; 437235 ; 437918 ; 357 51 ;
Abstract

A method of making a semiconductor device having a film resistive element. A resistive film is deposited over a substrate formed with a first contact hole open to an under-layer electrode region disposed in or on the substrate. The resistive layer is selectively etched to form the film resistive element and at the same time to leave portion of the resistive film disposed in and around the first contact hole. An inter-layer insulating film is then formed over the substrate. The inter-layer insulating film is selectively etched to form a second contact hole open to the film resistive element and at the same time to remove at least portion of the inter-layer insulating film disposed in and around the first contact hole. An over-layer electrode pattern film is formed in contact with the resistive film left in the first and second contact holes.


Find Patent Forward Citations

Hosaka, Takashi. (1991). Method of making semiconductor device with film resistor (U.S. Patent No. 5030588). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5030588

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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