The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1991
Filed:
Dec. 19, 1989
Peter I Bonyhard, San Martin, CA (US);
David C Cheng, Palo Alto, CA (US);
William J Glover, San Jose, CA (US);
Howard A Hendrix, Livermore, CA (US);
Ernest S Ward, San Jose, CA (US);
John W Williams, San Jose, CA (US);
International Business Machines, Armonk, NY (US);
Abstract
A sputtering apparatus in which the electrode for supporting the substrates upon which thin magnetic films are to be deposited has a polygon-shaped planar coil adjacent to a surface so that the coil can be energized to produce a uniform magnetic field at the surface of the substrates which is oriented normal to the polygon faces of the coil. This apparatus produces uniform easy axis of the thin magnetic films deposited on the substrates during relative motion between the substrates and the target electrode.