The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1991
Filed:
Oct. 01, 1984
Applicant:
Inventor:
Jan E van der Werf, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356401 ;
Abstract
A pre-alignment system for use in an apparatus including a fine alignment system. The pre-alignment system includes two optical imaging systems for imaging two alignment marks provided on a substrate for the purpose of fine alignment onto two radiation-sensitive detectors. The outputs signals of the detectors are indicative of the pre-alignments of a associated substrate mark relative to the associated detection systems.