The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 1991
Filed:
Oct. 12, 1989
Applicant:
Inventor:
Jurgen Engemann, Wuppertal, DE;
Assignee:
Leybold Aktiengesellschaft, , DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H / ; H01J / ; H01J / ; C23C / ;
U.S. Cl.
CPC ...
361225 ; 20429838 ; 156345 ; 328230 ; 31511141 ; 3133611 ;
Abstract
The invention relates to a device for the generation of electrically charged and/or uncharged particles in which into a cavity resonator (5) filled with a gas or gas mixture electromagnetic energy is introduced and in which a first magnetic field (19, 20) permeates the gas or gas mixture. With the aid of a second magnetic field (H.sub.ext, 40, 41) permeating the gyromagnetic material the cavity resonator (5) is tuned. Usually, the tuning is carried out in such a manner that a hollow space resonator (5) which is loaded and mistuned by the plasma is again brought into resonance.