The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 1991
Filed:
Jan. 24, 1990
Shigeru Suzuki, Tachikawa, JP;
Ushio Denki, Tokyo, JP;
Abstract
A film circuit substrate exposure apparatus is disclosed, in which members movable along an optical axis such as a reticle support, a projection lens and a film pressing member are mounted on a common linear movement guide by using a linear movement driver, for instance a cross roller guide, in a predetermined spaced-apart relation to one another to set the optical axis and without inclination with respect to the optical axis. The apparatus thus pronounced practical merits such as freedom from rattling, capability of ready positioning and focusing operations, less partial out of focus or aberration of obtainable patterns, and particularly elimination of complicated operations in double side exposure.