The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 1991
Filed:
Jun. 03, 1988
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118718 ; 118719 ; 118733 ; 414217 ; 242190 ;
Abstract
A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of the sealing portion or at one side thereof. Tension is applied to the object to be processed by another device provided between the guide rollers while the object is being conveyed, so as to enable it to be processed without being damaged.