The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 1991
Filed:
Oct. 13, 1989
Applicant:
Inventors:
Koji Hashimoto, Shogen, Izumi-ku, Sendai-shi, Miyagi, JP;
Hideaki Yoshioka, Sendai, JP;
Katsuhiko Asami, Sendai, JP;
Asahi Kawashima, Sendai, JP;
Assignees:
Yoshida Kogyo K.K., both of, JP;
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419215 ; 20419212 ; 20419216 ; 20429827 ;
Abstract
A method for preparation of amorphous superlattice alloys consisting of lamellae based on periodic change in the composition by continuous conventional sputtering with a periodic change in the positions of substrates relative to a target or targets by rotating the substrate on a first axis and orbiting the substrate and first axis around a second axis parallel to the first axis.