The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1991
Filed:
Aug. 21, 1989
Applicant:
Inventor:
Kouji Yamazaki, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 67 ; 357 231 ; 357 59 ; 357 71 ;
Abstract
A semiconductor device according to the present invention has a multiple-level gate electrode which consists of a lower polysilicon strip and an upper titanium silicide film containing a titanium oxide instead of boron or carbon for preventing the titanium silicide film from reduction in resistivity, and the device characteristics are not deteriorated, because the oxygen bonded to the titanium is stable in heat treatments and hardly diffused into the substrate.
Quick Actions:
Yamazaki, Kouji. (1991). Semiconductor device having high-reliable interconnections with titanium (U.S. Patent No. 5012320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5012320
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile