The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1991
Filed:
Jun. 11, 1990
Applicant:
Inventors:
Steven D Braymen, Ames, IA (US);
Bradley A Paulson, Ames, IA (US);
Kenneth D Goedken, Dubuque, IA (US);
Assignee:
Iowa State University Research Foundation, Inc., Ames, IA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156647 ; 156653 ; 156657 ; 156662 ; 437228 ; 437225 ; 310324 ;
Abstract
Thin film resonators are prepared by an improved process involving coating a patterned wafer with a sol-gel derived tantalum (V) oxide passivating film so that the circuitry can be protected from etching chemicals during the etching of vias through the back of the silicon wafer.
Quick Actions:
Braymen, Steven. (1991). Use of sol-gel derived tantalum oxide as a protective coating for (U.S. Patent No. 5011568). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5011568
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile