The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1991
Filed:
Jul. 31, 1989
Richard F Miller, Boca Raton, FL (US);
Other;
Abstract
An automatic wafer handling system utilizing a vacuum pneumatic controlled cable driving mechanism. In principle, the necessary movements are provided by air cylinder actuation of pulley supported cables. This application of vacuum force is substituted in place of positive air pressure, offering simplicity, reliability and stability by its use. Further advantages include the elimination of electric motor driving elements, thereby providing significant reduction of particulate and dust contamination problems. System operation includes the use of vacuum in the pickup of wafers, in manipulation and transport by cable drive, and motion control by means of air cylinders using negative air pressure.
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