The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 1991
Filed:
Jul. 20, 1990
Tsunesaburo Uemura, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A laser processor provided with a pulse oscillating laser light source, an exciter for exciting the laser light source on a trigger signal for pusle oscillation, a beam quality adjusting device for adjusting a beam quality as monitoring the pulse-oscillated laser light partly at least, a working apparatus for exposing or processing a workpiece by projecting the adjusted laser light thereon. The laser light from a laser light source side is intercepted by a shutter while it is not used on a sequence on a working apparatus side, thereby operating the laser light source for self-oscillation at a low frequency of 1 to 2 hz, for example; the laser light source is then operated for self-oscillation at a frequency higher than that with the shutter closed therefor when a quality abnormal signal is generated from an abnormal detector upon detection of a beam quality coming outside a standard.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile