The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 1991
Filed:
Jul. 07, 1989
Applicant:
Inventor:
Mark W Levi, Utica, NY (US);
Assignee:
United States of America, Washington, DC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; F25D / ;
U.S. Cl.
CPC ...
134-7 ; 134198 ; 51320 ; 51321 ; 51322 ; 51439 ;
Abstract
A wafer cleaning system which cleans semiconductor wafers by sand blasting them with ice particles is disclosed. In this system a stream of gas is conducted by a conduit to the semiconductor wafer while a spray of water is frozen into the ice particles by a number of cooling coil systems which protrude into the conduit. After the semiconductor wafer is sandblasted with ice, any residual ice is removed simply by evaporating it. This results in a clean wafer without the contamination that can accompany chemical solvents of other semiconductor cleaning and etching systems.