The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 1991
Filed:
Jul. 13, 1990
Applicant:
Inventors:
LaVerne A Schlie, Albuquerque, NM (US);
Robert D Rathge, Albuquerque, NM (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
315 39 ; 313 22 ; 313 36 ;
Abstract
In a high power microwave excited plasma system including a microwave energy source operatively coupled to a plasma tube for generating a plasma within the tube, a gaseous medium within the tube for supporting a plasma and a reflector for focusing radiation emitted from the tube, an improved cooling system for the tube is provided which comprises a jacket surrounding the tube and defining a passageway therearound, a source of liquid dimethyl polysiloxane, and a circulator for conducting the liquid dimethyl polysiloxane through the passageway in heat exchange relationship with the tube.